Trace Analysis Of Solid Surfaces By Combination Of Energetic Ion Bombardment And Multiphoton Resonance Ionization

F. M. Kimock; J. P. Baxter; P. H. Kobrin; D. L. Pappas; N. Winograd

doi:10.1117/12.936232

19 October 1983 Trace Analysis Of Solid Surfaces By Combination Of Energetic Ion Bombardment And Multiphoton Resonance Ionization

F. M. Kimock, J. P. Baxter, P. H. Kobrin, D. L. Pappas, N. Winograd

Author Affiliations +

Proceedings Volume 0426, Laser-Based Ultrasensitive Spectroscopy and Detection V; (1983) https://doi.org/10.1117/12.936232
Event: 27th Annual Technical Symposium, 1983, San Diego, United States

Abstract

Recently, multiphoton resonance ionization (MPRI) has been coupled with energetic ion bombardment to yield a highly efficient and selective tool for solids analysis. Although this method promises to yield sub-ppb analysis for some materials, there are a number of experimental factors which will utlimately limit the analytical sensitivity of the technique. Among these factors are a) duty cycle, b) primary ion current, c) sputter yield, d) fraction of ejecting particles which are ionizable, and e) detection efficiency. This paper discusses the origin of these factors and their influence on the use of MPRI for trace analysis of solids.

Citation Download Citation

F. M. Kimock, J. P. Baxter, P. H. Kobrin, D. L. Pappas, and N. Winograd "Trace Analysis Of Solid Surfaces By Combination Of Energetic Ion Bombardment And Multiphoton Resonance Ionization", Proc. SPIE 0426, Laser-Based Ultrasensitive Spectroscopy and Detection V, (19 October 1983); https://doi.org/10.1117/12.936232

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