Application of dielectric layers made in sol-gel technique in the technology of planar waveguide sensors

Pawel Karasinski

doi:10.1117/12.435923

8 August 2001 Application of dielectric layers made in sol-gel technique in the technology of planar waveguide sensors

Pawel Karasinski

Proceedings Volume 4516, Optoelectronic and Electronic Sensors IV; (2001) https://doi.org/10.1117/12.435923
Event: Optoelectronic and Electronic Sensors IV, 2000, Gliwice, Poland

Abstract

The work discusses the application potentials of sol-gel technique in the technology of planar waveguide sensor. The capability to form refractive profiles with the use of various techniques applied in planar optics have been compared. The authors present the results of investigation studies involving the application of sol-gel technique of the oxide system SiO₂:TiO₂ for the formation of sensor layers, mask layers and waveguide layers. The influence of the thickness of waveguide layer and of its refractive index on the sensitivity of the meter measuring the refractive index changes an working in the difference interferometer system has been investigated.

Citation Download Citation

Pawel Karasinski "Application of dielectric layers made in sol-gel technique in the technology of planar waveguide sensors", Proc. SPIE 4516, Optoelectronic and Electronic Sensors IV, (8 August 2001); https://doi.org/10.1117/12.435923

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