Experimental microfluidics toolbox for MEMS characterization

Steve T. Wereley; Carl D. Meinhart; Shannon Stone; Vince Hohreiter; Jacob Chung

doi:10.1117/12.443013

2 October 2001 Experimental microfluidics toolbox for MEMS characterization

Steve T. Wereley, Carl D. Meinhart, Shannon Stone, Vince Hohreiter, Jacob Chung

Proceedings Volume 4558, Reliability, Testing, and Characterization of MEMS/MOEMS; (2001) https://doi.org/10.1117/12.443013
Event: Micromachining and Microfabrication, 2001, San Francisco, CA, United States

Abstract

Flows in microscale domains are found in many places such as biomedical microdevices (Bio-MEMS), inkjet printer heads, micropropulsion systems, and microchannel networks, among many others. In fact, microfluidic devices represent the fastest growing and what is projected to be the dominant segment of the MEMS market. Because microscopic flows frequently display counter-intuitive behavior due to the different dominating forces at microscopic length scales, experimental diagnostic techniques are essential for characterizing microfluidic MEMS beharior. In recent work, we have developed several micron-scale fluidic diagnostic techniques. Micro-Particle Image Velocimetry (mPIV) measures the velocity of a flow by tracking the motion of small tracer particles seeded into the flow. To measure high velocity, small length scale flows, such as those found inside an inkjet, high-speed lasers and cameras are used in conjunction with a microscope to image the tracer particles with sub microsecond temporal resolution. Two extensions of the mPIV technique allow for flow boundary topology to be measured to with tens of nanometers and for the temperature of the flow to be measured. Combined, these three technique provide experimenters a very complete look at microfluidic device behavior at length scales on the order of 1 micron.

Citation Download Citation

Steve T. Wereley, Carl D. Meinhart, Shannon Stone, Vince Hohreiter, and Jacob Chung "Experimental microfluidics toolbox for MEMS characterization", Proc. SPIE 4558, Reliability, Testing, and Characterization of MEMS/MOEMS, (2 October 2001); https://doi.org/10.1117/12.443013

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