Fabrication of planar optical waveguide material on silicon by flame hydrolysis deposition

Yuanda Wu; Hua Xing; Letian Zhang; Zhongchang Zhuo; Yongshen Yu; Wei Zheng; Guofan Liu; Yushu Zhang

doi:10.1117/12.444971

19 October 2001 Fabrication of planar optical waveguide material on silicon by flame hydrolysis deposition

Yuanda Wu, Hua Xing, Letian Zhang, Zhongchang Zhuo, Yongshen Yu, Wei Zheng, Guofan Liu, Yushu Zhang

Proceedings Volume 4580, Optoelectronics, Materials, and Devices for Communications; (2001) https://doi.org/10.1117/12.444971
Event: Asia-Pacific Optical and Wireless Communications Conference and Exhibit, 2001, Beijing, China

Abstract

SiO2 thick films were deposited on silicon wafer (2 inches in diameter) as buffer layer for fabricating planar optical wave-guide by flame hydrolysis deposition (FHD) method. The deposition speed is as high as 8μ+m per minute. Then the deposited films were consolidated in electric furnaces in vacuum or air ambience at the temperature of 1380°C. As a result, transparent vitreous silica (or called silica glass) and semi-transparent cristobalite films were obtained. The thickness of the vitreous silica films is up to 40μm, and this kind of films is suitable for buffer layer of planar wave-guide. SiO2 thick films doped with GeO2 were obtained by the same process to fabricate the core layer. Finally, several factors affecting the consolidated silica films were discussed in detail.

Citation Download Citation

Yuanda Wu, Hua Xing, Letian Zhang, Zhongchang Zhuo, Yongshen Yu, Wei Zheng, Guofan Liu, and Yushu Zhang "Fabrication of planar optical waveguide material on silicon by flame hydrolysis deposition", Proc. SPIE 4580, Optoelectronics, Materials, and Devices for Communications, (19 October 2001); https://doi.org/10.1117/12.444971

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available