Aim-An Automated Inspection Microscope For Measuring Critical Dimensions

Ronald J. LeMaster

doi:10.1117/12.943046

15 October 1984 Aim-An Automated Inspection Microscope For Measuring Critical Dimensions

Ronald J. LeMaster

Proceedings Volume 0480, Integrated Circuit Metrology II; (1984) https://doi.org/10.1117/12.943046
Event: 1984 Technical Symposium East, 1984, Arlington, United States

Abstract

An automated system for measuring critical dimensions of hard disk heads in a production environment has been developed and put to use successfully in manufacturing. It measures features ranging in size from less than a micron to more than half a millimeter. The Automated Inspection Microscope (AIM), makes reliable measurements of these dimensions seven to nine times faster and with about twice the precision than the conventional methods which it replaced. A special purpose region building and merging algorithm produces results which are very dependable when contaminants, scratches or chips are present along with the feature to be measured. The system inspects loads of ninety six heads at a time with little or no operator intervention. This paper discusses the hardware components of the system, its programming, and its role as part of a parts tracking and inspection system. Particular attention will be given to the algorithms and techniques used in measuring the head gaps, which are are in the micron size range.

Citation Download Citation

Ronald J. LeMaster "Aim-An Automated Inspection Microscope For Measuring Critical Dimensions", Proc. SPIE 0480, Integrated Circuit Metrology II, (15 October 1984); https://doi.org/10.1117/12.943046

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available