Modeling of ellipsometric parameters of a nonuniform film with arbitrary orientation of an optical axis

Mikhail M. Karpuk

doi:10.1117/12.531219

19 November 2003 Modeling of ellipsometric parameters of a nonuniform film with arbitrary orientation of an optical axis

Mikhail M. Karpuk

Author Affiliations +

Proceedings Volume 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life; (2003) https://doi.org/10.1117/12.531219
Event: 19th Congress of the International Commission for Optics: Optics for the Quality of Life, 2002, Florence, Italy

Abstract

A computer model of calculation of matrix of reflection and ellipsometric angles of singleaxid films with an optic axis varying direction only with a thickness of a film on anisotropic substrate is developed. It is determined that the largest modifications of ellipsometric angles Δ and ψ are exhibited near the Brewster's angle for the bound air-substrate. Numerical simulation the Langmuir-Blodget films is showed, that Δ-ψ dependence have a sight of a spiral curves with an intersections in a thickness, and with a rotation of a film about plane incidence.

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Mikhail M. Karpuk "Modeling of ellipsometric parameters of a nonuniform film with arbitrary orientation of an optical axis", Proc. SPIE 4829, 19th Congress of the International Commission for Optics: Optics for the Quality of Life, (19 November 2003); https://doi.org/10.1117/12.531219

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