Fabrication of well-defined silicon and titanium oxide nanoparticles by laser ablation

Nobuhiro Aya; Seisuke Kano; Takafumi Seto; Makoto Hirasawa; Takaaki Orii; Kaname Sakiyama; Hirofumi Shimura

doi:10.1117/12.486572

19 February 2003 Fabrication of well-defined silicon and titanium oxide nanoparticles by laser ablation

Nobuhiro Aya, Seisuke Kano, Takafumi Seto, Makoto Hirasawa, Takaaki Orii, Kaname Sakiyama, Hirofumi Shimura

Proceedings Volume 4830, Third International Symposium on Laser Precision Microfabrication; (2003) https://doi.org/10.1117/12.486572
Event: LAMP 2002: International Congress on Laser Advanced Materials Processing, 2002, Osaka, Japan

Abstract

Nanometer-sized particles of silicon and titanium dioxide were generated by Nd:YAG laser ablation of solid substrates in a low pressure atmosphere. A low-pressure differential mobility analyzer (LP-DMA) was used to control the size of generated particles. The LP-DMA and a transmission electron microscopy (TEM) were used to measure the change in size distribution and morphology of nanoparticles with laser power and pressure. Finally, we succeeded to synthesize the almost spherical nanoparticles of 2-50 nm in diameter.

Citation Download Citation

Nobuhiro Aya, Seisuke Kano, Takafumi Seto, Makoto Hirasawa, Takaaki Orii, Kaname Sakiyama, and Hirofumi Shimura "Fabrication of well-defined silicon and titanium oxide nanoparticles by laser ablation", Proc. SPIE 4830, Third International Symposium on Laser Precision Microfabrication, (19 February 2003); https://doi.org/10.1117/12.486572

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available