Interference systems for 3D surface profiling and analysis using partially coherent light

Ye. V. Sysoev; I. A. Fomicheva; I. V. Golubev; Yu. D. Makashev; P. A. Orekhov; V. A. Shakhmatov; L. M. Stepnov

doi:10.1117/12.484560

29 July 2002 Interference systems for 3D surface profiling and analysis using partially coherent light

Ye. V. Sysoev, I. A. Fomicheva, I. V. Golubev, Yu. D. Makashev, P. A. Orekhov, V. A. Shakhmatov, L. M. Stepnov

Proceedings Volume 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life; (2002) https://doi.org/10.1117/12.484560
Event: Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, 2002, Novosibirsk, Russian Federation

Abstract

The measurement of surface profiles by use of the interference pattern of partially coherent light is described. A method based on the modulation the optical path lengths of the beams in the reference arm of an interferometer has been proposed for recording differential interferograms. A profilometer implementing this approach has been developed. Measuring results on the profiles of metal surfaces are provided. As an extension of this technique, a new fast method for measuring the depth of a surface profile has been proposed. The method relies on the polyzonal interference patterns of the partially coherent light. Experimental verification has been carried out, the results are provided.

Citation Download Citation

Ye. V. Sysoev, I. A. Fomicheva, I. V. Golubev, Yu. D. Makashev, P. A. Orekhov, V. A. Shakhmatov, and L. M. Stepnov "Interference systems for 3D surface profiling and analysis using partially coherent light", Proc. SPIE 4900, Seventh International Symposium on Laser Metrology Applied to Science, Industry, and Everyday Life, (29 July 2002); https://doi.org/10.1117/12.484560

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