Fabrication of reflective micromirror in micromechanical optical switches

Wei Dong; Weiyou Chen; Han Yang; Long Zhang; Ping Ji; Wenbin Guo; Caixia Liu; Xindong Zhang; Dongming Sun; Cuiping Jia; Jianxuan Pan

doi:10.1117/12.483156

10 September 2002 Fabrication of reflective micromirror in micromechanical optical switches

Wei Dong, Weiyou Chen, Han Yang, Long Zhang, Ping Ji, Wenbin Guo, Caixia Liu, Xindong Zhang, Dongming Sun, Cuiping Jia, Jianxuan Pan

Author Affiliations +

Proceedings Volume 4928, MEMS/MOEMS Technologies and Applications; (2002) https://doi.org/10.1117/12.483156
Event: Photonics Asia, 2002, Shanghai, China

Abstract

Using pure aqueous KOH solution and a one-level mask, the reflective micromirror in the direction <100> and the fibers self-aligned V-grooves in the direction <110> were fabricated on the (100) silicon. Reflective micromirror is a part of {100} family; the surface of the mirror is perpendicular at the optical axes. The deviation brought by manual assemble can be decreased by crystal orientation self-aligned between the micromirror and fibers. Using Atomic Force Microscope (AFM), the measured the surface roughness of the reflective micromirror is below 40nm, at a wavelength of 1550nm the reflectivity ofthe micromirror was measured to be higher than 80%.

Citation Download Citation

Wei Dong, Weiyou Chen, Han Yang, Long Zhang, Ping Ji, Wenbin Guo, Caixia Liu, Xindong Zhang, Dongming Sun, Cuiping Jia, and Jianxuan Pan "Fabrication of reflective micromirror in micromechanical optical switches", Proc. SPIE 4928, MEMS/MOEMS Technologies and Applications, (10 September 2002); https://doi.org/10.1117/12.483156

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