Generation and application of opto-mechancial microstructures on glass

Volker Schmidt; Winfried Arens; Ulrich Kriems

doi:10.1117/12.479559

15 January 2003 Generation and application of opto-mchancial microstructures on glass

Volker Schmidt, Winfried Arens, Ulrich Kriems

Proceedings Volume 4979, Micromachining and Microfabrication Process Technology VIII; (2003) https://doi.org/10.1117/12.479559
Event: Micromachining and Microfabrication, 2003, San Jose, CA, United States

Abstract

Microstructures on glass surfaces achieved an increasing relevance in industry and research during the last years. They are used to add various optical and/or mechanical functionalities to surfaces of glass components. Important mechanical functionalities are e.g. the anti-sticking behaviour of nanostructures or the generation of micro cavities. Reduced reflectivity and the addition of diffractive optical power with negative dispersion are examples of relevant optical functionalities which can be supplemented. The authors evaluated theoretically and experimentally different promising technologies for generating such structures. Especially there was tested the compression moulding replication process, the deep drawing of glass, etching and sandblasting. All these methods are able to generate microstructures and show characteristic advantages and disadvantages. Ion beam etching allows the smallest structures but is relatively expensive. Furthermore, the ion beam etching can be used for a large variety of materials. Sandblasting is a very effective way of generating deep structures, but is limited in feature size. Wet chemical etching is suitable for small structures but not able to achieve high aspect ratios in glass. The deep drawing of glass presents a very cost efficient way for generating microstructures in volume production. Here the disadvantage is the limited feature size and aspect ratio that can be generated. Utilizing its different advantages, applications are developed by the authors for all three technologies. These are applications to be used in sensors, displays and in the semiconductor industry.

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Volker Schmidt, Winfried Arens, and Ulrich Kriems "Generation and application of opto-mchancial microstructures on glass", Proc. SPIE 4979, Micromachining and Microfabrication Process Technology VIII, (15 January 2003); https://doi.org/10.1117/12.479559

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KEYWORDS

Glasses

Semiconducting wafers

Etching

Ion beams

Wet etching

Photomasks

Reactive ion etching

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