Paper
11 June 2003 2D yields 3D growth mode transition through Stranski-Krastanov mode during epitaxial growth
D. V. Brunev, A. N. Karpov, I. G. Neizvestny, Natalia L. Shwartz, Zoja Sh. Yanovitskaya
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Abstract
Using a kinetic Monte Carlo model atomic interlayer exchange influence on the Stranski-Krastsnov (SK) growth mode was investigated. With the increase of the deposited dose, transition from 2D to 3D growth mode within SK region without changing interlayer exchange and the growth parameters, was observed. Limit parameter values corresponding to 2D yields SK and SK yields 3D transitions were determined.
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D. V. Brunev, A. N. Karpov, I. G. Neizvestny, Natalia L. Shwartz, and Zoja Sh. Yanovitskaya "2D yields 3D growth mode transition through Stranski-Krastanov mode during epitaxial growth", Proc. SPIE 5023, 10th International Symposium on Nanostructures: Physics and Technology, (11 June 2003); https://doi.org/10.1117/12.510515
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KEYWORDS
Monte Carlo methods

3D modeling

Diffusion

3D acquisition

Epitaxy

Heteroepitaxy

Radon

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