Plasma diagnostics of Ge-clusters in Si11-xgex mixed crystals

Yu. S. Gordeev; Valery M. Mikoushkin; V. V. Brysgalov; Andrej G. Zabrodskii; M. V. Alekseenko; H. Grimmeiss

doi:10.1117/12.514645

11 June 2003 Plasma diagnostics of Ge-clusters in Si_1-xGe_x mixed crystals

Yu. S. Gordeev, Valery M. Mikoushkin, V. V. Brysgalov, Andrej G. Zabrodskii, M. V. Alekseenko, H. Grimmeiss

Proceedings Volume 5023, 10th International Symposium on Nanostructures: Physics and Technology; (2003) https://doi.org/10.1117/12.514645
Event: 2003 Chapter books, 2003, Bellingham, WA, United States

Abstract

Mixed Crystals of Si_1-xGe_x (x < 0.05) grown by the method of zone melting have been studied by Electron Energy Loss Spectroscopy (EELS) in recoil. The contribution of Ge-bulk plasmon spectrum was revealed in the plasmon spectra of Mixed Crystals, and the conclusion has been made that an essential part of Ge atoms are included into Ge clusters. Plasma diagnostics of clusters in SiGe alloys is suggested on the basis of EEL spectroscopy.

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Yu. S. Gordeev, Valery M. Mikoushkin, V. V. Brysgalov, Andrej G. Zabrodskii, M. V. Alekseenko, and H. Grimmeiss "Plasma diagnostics of Ge-clusters in Si_1-xGe_x mixed crystals", Proc. SPIE 5023, 10th International Symposium on Nanostructures: Physics and Technology, (11 June 2003); https://doi.org/10.1117/12.514645

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