Monolithic detector array comprised of >1000 aerial image sensing elements

Roderick R. Kunz; Dennis D. Rathman; Steven J. Spector; Michael S. Yeung

doi:10.1117/12.485414

26 June 2003 Monolithic detector array comprised of >1000 aerial image sensing elements

Roderick R. Kunz, Dennis D. Rathman, Steven J. Spector, Michael S. Yeung

Proceedings Volume 5040, Optical Microlithography XVI; (2003) https://doi.org/10.1117/12.485414
Event: Microlithography 2003, 2003, Santa Clara, California, United States

Abstract

A monolithically integrated multi-element photodiode array with 7749 discrete detectors has been fabricated where each sensing element is equipped with a sampling aperture to allow for aerial image measurements with high spatial precision in the focal plane of lithographic lenses. As currently configured, any one of seven 1107-element linear arrays can be used at a given time to allow sampling across the long axis of a scanner lens. The individual elements are located 24 microns apart and are broken down into 27 sets of 41 distinctly different aperture types, with each set spaced 1 mm apart. In addition, the sampling apertures on the device are small enough to allow the device to act as a polarization sensor with high (<50 microns) spatial resolution. The high speed analog output amplifier allows for complete 1107-element images to be obtained at the full repetition rate of lithographic lasers (2KHz).

Citation Download Citation

Roderick R. Kunz, Dennis D. Rathman, Steven J. Spector, and Michael S. Yeung "Monolithic detector array comprised of >1000 aerial image sensing elements", Proc. SPIE 5040, Optical Microlithography XVI, (26 June 2003); https://doi.org/10.1117/12.485414

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