Vibration measurement of microcomponents by fringe projection method

Tao Wu; ChoJui Tay; Chenggen Quan; Shihua Wang; HuaiMin Shang

doi:10.1117/12.514242

24 April 2003 Vibration measurement of microcomponents by fringe projection method

Tao Wu, ChoJui Tay, Chenggen Quan, Shihua Wang, HuaiMin Shang

Proceedings Volume 5116, Smart Sensors, Actuators, and MEMS; (2003) https://doi.org/10.1117/12.514242
Event: Microtechnologies for the New Millennium 2003, 2003, Maspalomas, Gran Canaria, Canary Islands, Spain

Abstract

This paper presents an optical fringe projection method for measuring the dynamic micro-components. Using a programmable liquid crystal display (LCD) projector and a long working distance microscope (LDM), sinusoidal fringes are projected onto a micro-component. The image of the fringe pattern is captured by another LDM and a high-speed camera and subsequently processed by the Fast Fourier Transform (FFT) technique. A simple procedure is described which enables calibration of the optical setup for subsequent amplitude and frequency measurement of the vibrating components. To overcome the underexposure problem, a white light source (WLS) is incorporated and the dynamic range of the camera is increased by a factor of 6. Discrepancy in the measured vibration amplitude is less than 1%.

Citation Download Citation

Tao Wu, ChoJui Tay, Chenggen Quan, Shihua Wang, and HuaiMin Shang "Vibration measurement of microcomponents by fringe projection method", Proc. SPIE 5116, Smart Sensors, Actuators, and MEMS, (24 April 2003); https://doi.org/10.1117/12.514242

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