Grating fabrication through x-ray lithography

Pantazis Z. Mouroulis; Frank T. Hartley; Richard E. Muller; Daniel W. Wilson; Aidan Shori; Martin Feldman; Li Jiang; Todd R. Christenson

doi:10.1117/12.503200

3 November 2003 Grating fabrication through x-ray lithography

Pantazis Z. Mouroulis, Frank T. Hartley, Richard E. Muller, Daniel W. Wilson, Aidan Shori, Martin Feldman, Li Jiang, Todd R. Christenson

Author Affiliations +

Proceedings Volume 5173, Current Developments in Lens Design and Optical Engineering IV; 51730D (2003) https://doi.org/10.1117/12.503200
Event: Optical Science and Technology, SPIE's 48th Annual Meeting, 2003, San Diego, California, United States

Abstract

Blazed gratings have been fabricated using gray-scale X-ray lithography. The gratings have high efficiency, low parasitic light, and high groove quality. They can be generated over a considerable depth for use anywhere in the ultraviolet to middle infrared range. They can also be recorded on substrates of considerable curvature.

Citation Download Citation

Pantazis Z. Mouroulis, Frank T. Hartley, Richard E. Muller, Daniel W. Wilson, Aidan Shori, Martin Feldman, Li Jiang, and Todd R. Christenson "Grating fabrication through x-ray lithography", Proc. SPIE 5173, Current Developments in Lens Design and Optical Engineering IV, 51730D (3 November 2003); https://doi.org/10.1117/12.503200

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