Fabrication methods, operation, and measurement of electrokinetic fluid manipulation devices

Steven N. Higginbotham; Denis R. Sweatman

doi:10.1117/12.530158

29 March 2004 Fabrication methods, operation, and measurement of electrokinetic fluid manipulation devices

Steven N. Higginbotham, Denis R. Sweatman

Proceedings Volume 5275, BioMEMS and Nanotechnology; (2004) https://doi.org/10.1117/12.530158
Event: Microelectronics, MEMS, and Nanotechnology, 2003, Perth, Australia

Abstract

Lab-on-a-chip BioMEMS devices have developed in recent years as a way to rapidly perform total biological analysis. With the complexity of fabrication of mechanical parts in microfluidic devices comes the desire to create devices which use alternative methods of pumping, mixing and manipulating fluids and suspended microparticles for reactions - such as electrokinetics. This paper presents novel ways of fabricating electrokinetic devices, which use the phenomenon of dielectrophoresis (DEP) for manipulation of suspended microparticles. Affects of driving waveforms are investigated. Visual results from microparticles are used to show the effect of operation of electrokinetic devices. Improved device designs and device operation are discussed.

Citation Download Citation

Steven N. Higginbotham and Denis R. Sweatman "Fabrication methods, operation, and measurement of electrokinetic fluid manipulation devices", Proc. SPIE 5275, BioMEMS and Nanotechnology, (29 March 2004); https://doi.org/10.1117/12.530158

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