Development of over 300 watts average power excimer laser

Kazuhiro Hirata; Joichi Kawamura; Hiroyuki Katou; Kazuaki Sajiki; Makoto Okada

doi:10.1117/12.528911

11 May 2004 Development of over 300-watts average power excimer laser

Kazuhiro Hirata, Joichi Kawamura, Hiroyuki Katou, Kazuaki Sajiki, Makoto Okada

Proceedings Volume 5334, Gas and Chemical Lasers, and Applications III; (2004) https://doi.org/10.1117/12.528911
Event: Lasers and Applications in Science and Engineering, 2004, San Jose, Ca, United States

Abstract

The high power excimer laser was developed. We have supplied the 240 watts (800 mJ, 300 Hz) average power excimer laser for industrial use, mainly for TFT LCD annealing. We are going to add the 300 watts (1 J, 300 Hz) average power laser for our line-up. This 300 watts new laser is based on the 240 watts laser, but improved some points. The electrodes size is longer and the electrical power circuit is reinforcement. Laser gas recipe is changed to be good for new system. In our test, we could oscillate over 300 watts average power operation. 310 watts servo operation is able to oscillate over 40 million pulses with less than 1.0 per cent for σ output stability. 330 watts servo operation is able to oscillate over 30 million pulses with almost less than 1.0 per cent for σ output stability. Experimental and theoretical studies of various parameters influencing the laser performance will be continued with further investigations and future improvements. We have confidence that it will be possible for this laser to produce higher power with long gas life.

Citation Download Citation

Kazuhiro Hirata, Joichi Kawamura, Hiroyuki Katou, Kazuaki Sajiki, and Makoto Okada "Development of over 300-watts average power excimer laser", Proc. SPIE 5334, Gas and Chemical Lasers, and Applications III, (11 May 2004); https://doi.org/10.1117/12.528911

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