Method to improve the resolution of contact holes

Gerhard Kunkel; Ralf Ziebold

doi:10.1117/12.535246

28 May 2004 Method to improve the resolution of contact holes

Gerhard Kunkel, Ralf Ziebold

Proceedings Volume 5377, Optical Microlithography XVII; (2004) https://doi.org/10.1117/12.535246
Event: Microlithography 2004, 2004, Santa Clara, California, United States

Abstract

Various methods of printing small contact holes are discussed. Although the resolution capability is one key object for printing small contacts, it does not always reflect the process window. This paper compares resolution as well as process windows for several contact printing techniques. It shows the huge benefit of ring-type contacts with respect to process window even when compared to Bessel like contacts.

Citation Download Citation

Gerhard Kunkel and Ralf Ziebold "Method to improve the resolution of contact holes", Proc. SPIE 5377, Optical Microlithography XVII, (28 May 2004); https://doi.org/10.1117/12.535246

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