Experimental investigation on the dynamics of MEMS structures

Gino Rinaldi; Muthukumaran Packirisamy; Ion G. Stiharu

doi:10.1117/12.547544

16 August 2004 Experimental investigation on the dynamics of MEMS structures

Gino Rinaldi, Muthukumaran Packirisamy, Ion G. Stiharu

Proceedings Volume 5455, MEMS, MOEMS, and Micromachining; (2004) https://doi.org/10.1117/12.547544
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

Modeling, manipulating and testing of the dynamic performances of micro-electro-mechanical systems (MEMS) devices are very important in building successful microsystems. However, MEMS devices pose several significant difficulties in characterization. The physical dimensions of MEMS devices are such that conventional measurement and characterization techniques cannot be used since the sensor would interfere with the measurement. Hence, non-contact sensing systems offer many advantages for MEMS characterization. One important issue in characterizing and troubleshooting MEMS devices is the differentiation between electrical and mechanical effects. By definition, MEMS devices are comprised of electrical and mechanical components forming integrated electro-mechanical systems. The dynamic response of these devices is often difficult to determine because of the coupled electro-mechanical behavior. It is also known that the dynamic response is influenced by the limitation of fabrication processes and the material conditions. Hence, this paper proposes a simpler method to verify the dynamic behavior of MEMS structures using Laser Doppler Velocimeter (LDV). Non-contact vibration measurements are thus possible with such a testing system that can lead to significant improvements in the accuracy and precision of MEMS testing. The dynamic experiments are conducted on different devices and the test results are compared with prediction.

Citation Download Citation

Gino Rinaldi, Muthukumaran Packirisamy, and Ion G. Stiharu "Experimental investigation on the dynamics of MEMS structures", Proc. SPIE 5455, MEMS, MOEMS, and Micromachining, (16 August 2004); https://doi.org/10.1117/12.547544

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available