Digital holographic microscopy applied to metrology

Christian D. Depeursinge; Florian Charriere; Anca M. Marian; Frederic Montfort; Tristan Colomb; Jonas Kuhn; Etienne Cuche; Yves Emery; Pierre Marquet; Pierre J. Magistretti

doi:10.1117/12.546014

10 September 2004 Digital holographic microscopy applied to metrology

Christian D. Depeursinge, Florian Charriere, Anca M. Marian, Frederic Montfort, Tristan Colomb, Jonas Kuhn, Etienne Cuche, Yves Emery, Pierre Marquet, Pierre J. Magistretti

Author Affiliations +

Proceedings Volume 5457, Optical Metrology in Production Engineering; (2004) https://doi.org/10.1117/12.546014
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

We report on a method called Digital Holographic Microscopy (DHM) for the numerical reconstruction of digital holograms taken with a microscope. It allows for simultaneous amplitude and quantitative phase contrast imaging. The reconstruction method computes the propagation of the complex optical wavefront diffracted by the object and is used to determine the refractive index and/or shape of the object with an accuracy in the nanometer range along the optical axis. A single hologram is needed for reconstruction. The method requires the adjustment of several reconstruction parameters. The adjustment is performed automatically by using a suitable algorithm. The method has been applied to the measurement of several integrated optics devices, MOEMS, and integrated micro-optical components: microlenses.

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Christian D. Depeursinge, Florian Charriere, Anca M. Marian, Frederic Montfort, Tristan Colomb, Jonas Kuhn, Etienne Cuche, Yves Emery, Pierre Marquet, and Pierre J. Magistretti "Digital holographic microscopy applied to metrology", Proc. SPIE 5457, Optical Metrology in Production Engineering, (10 September 2004); https://doi.org/10.1117/12.546014

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