A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity

Christophe Gorecki; Dominique Heinis

doi:10.1117/12.546003

17 August 2004 A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity

Christophe Gorecki, Dominique Heinis

Proceedings Volume 5458, Optical Micro- and Nanometrology in Manufacturing Technology; (2004) https://doi.org/10.1117/12.546003
Event: Photonics Europe, 2004, Strasbourg, France

Abstract

We propose and demonstrate an original concept of a near-field sensor using the optical feedback properties of a vertical cavity surface-emitting laser as an active principle of detection. This is based on the monitoring perturbations induced in the laser cavity by the backscattered light coming from the specimen. Test images confirm the efficiency of proposed SNOM microscope and a solution for the integration of proposed architecture is given.

Citation Download Citation

Christophe Gorecki and Dominique Heinis "A miniaturized SNOM sensor based on the optical feedback inside the VCSEL cavity", Proc. SPIE 5458, Optical Micro- and Nanometrology in Manufacturing Technology, (17 August 2004); https://doi.org/10.1117/12.546003

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