Multilevel kinoform microlens arrays in fused silica for high-power laser optics

Victor V. Atuchin; I. S. Soldatenkov; A. V. Kirpichnikov; E. V. Mikhailov; Efim V. Pestryakov; Dmitriy V. Sheglov

doi:10.1117/12.558295

15 March 2004 Multilevel kinoform microlens arrays in fused silica for high-power laser optics

Victor V. Atuchin, I. S. Soldatenkov, A. V. Kirpichnikov, E. V. Mikhailov, Efim V. Pestryakov, Dmitriy V. Sheglov

Proceedings Volume 5481, Laser Optics 2003: Wavefront Transformation and Laser Beam Control; (2004) https://doi.org/10.1117/12.558295
Event: Laser Optics 2003, 2003, St. Petersburg, Russian Federation

Abstract

Diffraction microlens arrays has been fabricated in silica substrates by deep UV photolithography and wet chemical etching. The calculated kinoform profile has been approximated by multistep function and this microrelief has been transfered into the surface with wet etching through the photoresist mask. The diffraction efficiency of eight-level kinoform microlens is as high as 85%.

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Victor V. Atuchin, I. S. Soldatenkov, A. V. Kirpichnikov, E. V. Mikhailov, Efim V. Pestryakov, and Dmitriy V. Sheglov "Multilevel kinoform microlens arrays in fused silica for high-power laser optics", Proc. SPIE 5481, Laser Optics 2003: Wavefront Transformation and Laser Beam Control, (15 March 2004); https://doi.org/10.1117/12.558295

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