Industrial applications of ultrahigh precision short-pulse laser processing

Xinbing Liu

doi:10.1117/12.599113

12 April 2005 Industrial applications of ultrahigh precision short-pulse laser processing (Invited Paper)

Xinbing Liu

Proceedings Volume 5713, Photon Processing in Microelectronics and Photonics IV; (2005) https://doi.org/10.1117/12.599113
Event: Lasers and Applications in Science and Engineering, 2005, San Jose, California, United States

Abstract

Short-pulse lasers of femtosecond and picosecond durations are used in ultrahigh precision processing of optical, electronic, and micro-mechanical devices. In this paper we discuss the fabrication of high quality photonic crystal band-pass filters with femtosecond laser pulses. We also discuss the parallel processing of inkjet nozzles with a picosecond laser. A laser milling algorithm and a high accuracy beam scanner allows the formation of precisely shaped holes as inkjet nozzles, and an efficient diffractive beam splitter allows the simultaneous drilling of many hundreds of holes for low cost manufacturing.

Citation Download Citation

Xinbing Liu "Industrial applications of ultrahigh precision short-pulse laser processing (Invited Paper)", Proc. SPIE 5713, Photon Processing in Microelectronics and Photonics IV, (12 April 2005); https://doi.org/10.1117/12.599113

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available