Modeling of electrostatically actuated cylindrical-waveguide-based optical microsystem

Srinivasa Raghavendra Pendyala; Muthukumaran Packirisamy; Ion Stiharu; Narayanswamy Sivakumar; Vahe Nerguizian

doi:10.1117/12.591368

22 January 2005 Modeling of electrostatically actuated cylindrical-waveguide-based optical microsystem

Srinivasa Raghavendra Pendyala, Muthukumaran Packirisamy, Ion Stiharu, Narayanswamy Sivakumar, Vahe Nerguizian

Proceedings Volume 5719, MOEMS and Miniaturized Systems V; (2005) https://doi.org/10.1117/12.591368
Event: MOEMS-MEMS Micro and Nanofabrication, 2005, San Jose, California, United States

Abstract

This paper describes the design of a novel electrostatically actuated optical attenuator that uses the electrostatic actuation of a cylindrical waveguide. The optical MEMS device consists of an electrostatically actuated waveguide positioned in a V-groove and overhanging at the end to act as a cantilever. The optical fiber waveguide can be sputtered with a thin film of gold that acts as a good electrode. The electrostatic force between the electrodes actuates the input fiber under the application of a voltage and causes misalignment between the input and output fibers and thereby attenuates the amount of light transmitted to the output fiber. Electrostatic modeling of the system presented in this paper is simple and sufficiently accurate. The proposed analytical model takes into consideration the geometry of the cylindrical electrodes. The geometrical relationship of the cantilever beam to the range of the biasing voltage is also discussed. The paper presents the variation of deflection of the waveguide and the variation of power loss with respect to the applied voltages. The obtained results clearly demonstrate the efficient use of the proposed method and modeling approach.

Citation Download Citation

Srinivasa Raghavendra Pendyala, Muthukumaran Packirisamy, Ion Stiharu, Narayanswamy Sivakumar, and Vahe Nerguizian "Modeling of electrostatically actuated cylindrical-waveguide-based optical microsystem", Proc. SPIE 5719, MOEMS and Miniaturized Systems V, (22 January 2005); https://doi.org/10.1117/12.591368

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