Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano

doi:10.1117/12.580083

25 March 2005 Carbon nanotube technologies for future ULSI via interconnects

Yuji Awano

Proceedings Volume 5732, Quantum Sensing and Nanophotonic Devices II; (2005) https://doi.org/10.1117/12.580083
Event: Integrated Optoelectronic Devices 2005, 2005, San Jose, California, United States

Abstract

We demonstrate the advantages of carbon nanotubes (CNTs) for ULSI interconnections, which we believe that it must be one of the most promising applications for metallic carbon nanotubes. We report present status of CNT material technologies and the potential of metallic CNT vias for future ULSI interconnections.

Citation Download Citation

Yuji Awano "Carbon nanotube technologies for future ULSI via interconnects", Proc. SPIE 5732, Quantum Sensing and Nanophotonic Devices II, (25 March 2005); https://doi.org/10.1117/12.580083

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