Dielectric constant measurements of nanoscale thickness polymeric films

Ramazan Asmatulu; William B. Spillman Jr.; Richard O. Claus

doi:10.1117/12.592928

16 May 2005 Dielectric constant measurements of nanoscale thickness polymeric films

Ramazan Asmatulu, William B. Spillman Jr., Richard O. Claus

Proceedings Volume 5761, Smart Structures and Materials 2005: Active Materials: Behavior and Mechanics; (2005) https://doi.org/10.1117/12.592928
Event: SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, 2005, San Diego, California, United States

Abstract

Nanoscale polymeric films were fabricated on Al coated glass slides using a spin coater. The thicknesses of the films (anti-reflective coatings-ARC) were 350 nm, 240 nm and 195 nm obtained at 1500 rpm, 3000 rpm and 4500 rpm, respectively. Measurement electrodes were fabricated on the ARC films using silver epoxy. Capacitance tests conducted at 1 mV and 15% relative humidity were used to determine the dielectric constant of the films over various temperature and frequency ranges. Based on the test results, it is assumed that this is a very useful technique to accurately and easily measure the capacitance and dielectric constant values of nanothickness polymeric films.

Citation Download Citation

Ramazan Asmatulu, William B. Spillman Jr., and Richard O. Claus "Dielectric constant measurements of nanoscale thickness polymeric films", Proc. SPIE 5761, Smart Structures and Materials 2005: Active Materials: Behavior and Mechanics, (16 May 2005); https://doi.org/10.1117/12.592928

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