Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems

Tilo Pfeifer; Robert Schmitt; Ubaldo Aleriano

doi:10.1117/12.608980

1 July 2005 Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems

Tilo Pfeifer, Robert Schmitt, Ubaldo Aleriano

Proceedings Volume 5836, Smart Sensors, Actuators, and MEMS II; (2005) https://doi.org/10.1117/12.608980
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

The aim of this article is to illustrate the need for reverse engineering in order to manufacture parts for Micro- and Nano- electromechanical systems, specially in the medical field. Afterwards, an overview of the newest optical devices for production metrology and quality control of Mems & Nems is provided. Finally, a new concept for a modular optical-system able to digitalise micro-parts is presented. The system is proposed for scanning measurement of topographies and digitalising of complete geometries. The system is able to generate a parametric 3D database that can be used for tooling or design modifications. The resulting data can also be used to generate a colour map comparison report. This paper ends with conclusions and an overview of the future in metrology for Mems & Nems.

Citation Download Citation

Tilo Pfeifer, Robert Schmitt, and Ubaldo Aleriano "Advanced optical metrology aimed at part inspection and reverse engineering for Mems and Nems", Proc. SPIE 5836, Smart Sensors, Actuators, and MEMS II, (1 July 2005); https://doi.org/10.1117/12.608980

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available