Laser irradiation, ion implantation and e-beam writing of integrated optical structures

Giancarlo C. Righini; I. Banyasz; S. Berneschi; M. Brenci; A. Chiasera; M. Cremona; D. Ehrt; M. Ferrari; R. M. Montereali; G. Nunzi Conti; S. Pelli; S. Sebastiani; C. Tosello

doi:10.1117/12.609231

7 July 2005 Laser irradiation, ion implantation, and e-beam writing of integrated optical structures

Giancarlo C. Righini, I. Banyasz, S. Berneschi, M. Brenci, A. Chiasera, M. Cremona, D. Ehrt, M. Ferrari, R. M. Montereali, G. Nunzi Conti, S. Pelli, S. Sebastiani, C. Tosello

Author Affiliations +

Proceedings Volume 5840, Photonic Materials, Devices, and Applications; (2005) https://doi.org/10.1117/12.609231
Event: Microtechnologies for the New Millennium 2005, 2005, Sevilla, Spain

Abstract

Much attention is currently being paid to the materials and processes that allow one to directly write or to imprint waveguiding structures and/or diffractive elements for optical integrated circuits by exposure from a source of photons, electrons or ions. Here a brief overview of the results achieved in our laboratories is presented, concerning the fabrication and characterization of optical guiding structures based on different materials and exposure techniques. These approaches include: electron and ion beam writing of waveguides in (poly)-crystalline lithium fluoride, uv-laser printing of waveguides and gratings in photorefractive glass thin films, and fs-laser writing in tellurite glasses. Properties and perspectives of these approaches are also discussed.

Citation Download Citation

Giancarlo C. Righini, I. Banyasz, S. Berneschi, M. Brenci, A. Chiasera, M. Cremona, D. Ehrt, M. Ferrari, R. M. Montereali, G. Nunzi Conti, S. Pelli, S. Sebastiani, and C. Tosello "Laser irradiation, ion implantation, and e-beam writing of integrated optical structures", Proc. SPIE 5840, Photonic Materials, Devices, and Applications, (7 July 2005); https://doi.org/10.1117/12.609231

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available