Paper
11 October 2005 Effects of process parameters on pulsed laser deposition of hydroxyapatite
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Abstract
Effects of process parameters on pulsed laser deposition of hydroxyapatite (Ca10(PO4)6(OH)2) were studied. Process parameters like laser energy and ambient atmosphere influence both the expansion dynamics of a laser ablated plasma plume and topography of deposited layers. The plume created using 193 nm, 20 ns pulses from ArF laser was analysed by means of space and time resolved optical emission spectroscopy. The velocity of the plasma plume at several distances from the target in different ambient conditions was determined. The deposited hydroxyapatite layers were analyzed by means of atomic force microscopy and X-ray diffractometry in order to determine the film topography, its structure and mechanical and physical properties. The results show that the plume expansion velocity as well as the topography of deposited films depend on the sort of ambient gas and its pressure.
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W. Mróz, M. Jedyński, K. Kasuya, R. Major, A. Prokopiuk, and Z. Szymański "Effects of process parameters on pulsed laser deposition of hydroxyapatite", Proc. SPIE 5958, Lasers and Applications, 59582X (11 October 2005); https://doi.org/10.1117/12.622847
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KEYWORDS
Protactinium

Calcium

Plasma

Laser ablation

Pulsed laser deposition

Laser energy

Atmospheric plasma

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