Dynamic analysis of a compliant bistable micromechanism with one DOF system

Jinni Tsay; Cheng-Kuo Sung

doi:10.1117/12.638351

3 January 2006 Dynamic analysis of a compliant bistable micromechanism with one DOF system

Jinni Tsay, Cheng-Kuo Sung

Proceedings Volume 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV; 60371N (2006) https://doi.org/10.1117/12.638351
Event: Microelectronics, MEMS, and Nanotechnology, 2005, Brisbane, Australia

Abstract

This paper presents an investigation on the dynamic characteristics of a compliant bistable micromechanism. The analyzed bistable micromechanism has two stationary positions at the two extremes of the motion range, where the strain energies are local minimum. A bistable mechanism is a nonlinear system with a special stiffness. In this study, the compliant bistable micromechanism adopted was a well-known configuration. The central mass of the micromechanism was treated as a carriage to carry switching components, such as a mirror or an electrical contact. The dynamic characteristics of the bistable micromechanism would be significant in the application of switching devices. In order to verify the correctness of theoretical prediction on the dynamic characteristics, the designed micromechanisms were fabricated by MEMSCAP's PolyMUMPs^(R). In addition, a test rig incorporating the required instruments was then constructed for measuring the performance of the bistable micromechanism. From the experimental study, it revealed that good agreement between analytical and experimental results were obtained.

Citation Download Citation

Jinni Tsay and Cheng-Kuo Sung "Dynamic analysis of a compliant bistable micromechanism with one DOF system", Proc. SPIE 6037, Device and Process Technologies for Microelectronics, MEMS, and Photonics IV, 60371N (3 January 2006); https://doi.org/10.1117/12.638351

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KEYWORDS

Actuators

Switching

Complex systems

Microelectromechanical systems

Bismuth

Bistability

Instrument modeling

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