Fabrication of multilayer passive electric components using inkjet printing and low temperature laser processing on polymer

Seung Hwan Ko; Jaewon Chung; Heng Pan; Costas P. Grigoropoulos; Dimos Poulikakos

doi:10.1117/12.647872

1 March 2006 Fabrication of multilayer passive electric components using inkjet printing and low temperature laser processing on polymer

Seung Hwan Ko, Jaewon Chung, Heng Pan, Costas P. Grigoropoulos, Dimos Poulikakos

Author Affiliations +

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61060E (2006) https://doi.org/10.1117/12.647872
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

The low temperature fabrication of passive electrical components (conductor, capacitor) on the flexible polymer substrate is presented in this paper. A drop-on-demand (DOD) ink-jetting system was used to print gold nano-particles suspended in Alpha-Terpineol solvent and PVP in PGMEA solvent to fabricate passive electrical components on flexible polymer substrate. Short pulsed laser ablation enabled finer electrical components to overcome limitation of inkjet process. Continuous Argon ion laser was irradiated locally to evaporate carrier solvent as well as to sinter gold nano-particles. In addition, a self alignment technique for PVP layer was demonstrated taking advantage of the deliberate modification of surface wetting characteristics. Finally, a new selective ablation of multilayered gold nanoparticle film was demonstrated using the ablation threshold difference for sintered and non sintered gold nanoparticles.

Citation Download Citation

Seung Hwan Ko, Jaewon Chung, Heng Pan, Costas P. Grigoropoulos, and Dimos Poulikakos "Fabrication of multilayer passive electric components using inkjet printing and low temperature laser processing on polymer", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060E (1 March 2006); https://doi.org/10.1117/12.647872

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available