Micro/nanoscale surface modification and structuring using lasers

Y. F. Lu

doi:10.1117/12.658302

1 March 2006 Micro/nanoscale surface modification and structuring using lasers

Y. F. Lu

Proceedings Volume 6106, Photon Processing in Microelectronics and Photonics V; 61060Z (2006) https://doi.org/10.1117/12.658302
Event: Lasers and Applications in Science and Engineering, 2006, San Jose, California, United States

Abstract

Various micro/nanoscale materials and devices are being developed for applications in biology, materials, electronics, chemistry, and physics. Areas such as micro/nanocomposites, molecular electronics, molecular motors, self-assembled nanoenergetics, and nanobiology are just a few examples. A major obstacle to making progress on the micro/nanoscale is the lack of powerful fabrication and diagnostic techniques that work effectively to make the structures and to determine the morphology, chemical composition, and electronic/optical properties. In particular, there is a lack of techniques to diagnose individual nanostructures to find their geometries, electronic properties, optical properties, and chemical compositions in a correlated manner. Laser material processing and characterization is traditionally used in microscale applications due to the diffraction limit of light. In order to apply laser-based techniques in nanotechnology, we have to develop methods which can overcome the optical diffraction limit. In this paper, we will review a few techniques developed in recent years, including laser-assisted scanning probe microscope, superfocusing by optical resonance in spherical particles, laser nanoimprinting, laser synthesis of quantum dots, laser annealing of ultrashow pn junctions, nanometer-order film thickness detection using rotational Raman spectroscopy, laser cleaning of nanoparticles, near-field-controlled material deposition, laser-assisted growth of carbon nanotubes, and laser synthesis of one-dimensional carbon structures.

Citation Download Citation

Y. F. Lu "Micro/nanoscale surface modification and structuring using lasers", Proc. SPIE 6106, Photon Processing in Microelectronics and Photonics V, 61060Z (1 March 2006); https://doi.org/10.1117/12.658302

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KEYWORDS

Particles

Silicon

Carbon

Silica

Annealing

Raman spectroscopy

Scanning electron microscopy

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