Simulation and fabrication of nitride-based moth-eye light-emitting diodes

M. Nakashima; H. Kasugai; A. Deguchi; K. Balakrishnan; M. Iwaya; S. Kamiyama; H. Amano; I. Akasaki

doi:10.1117/12.661181

28 February 2006 Simulation and fabrication of nitride-based moth-eye light-emitting diodes

M. Nakashima, H. Kasugai, A. Deguchi, K. Balakrishnan, M. Iwaya, S. Kamiyama, H. Amano, I. Akasaki

Proceedings Volume 6115, Physics and Simulation of Optoelectronic Devices XIV; 61151Y (2006) https://doi.org/10.1117/12.661181
Event: Integrated Optoelectronic Devices 2006, 2006, San Jose, California, United States

Abstract

Light extraction efficiency of nitride-based blue-light-emitting diodes on SiC substrate is theoretically investigated using rigorously coupled wave analysis method. Rigidly periodic moth eye structure is found to show superior light extraction efficiency compared with conventional rectangular parallelepiped or pseudo-moth eye structures. High-throughput technology by laser interference lithography for the fabrication of rigidly periodic moth eye structure is established using a 244 nm laser as the light source.

Citation Download Citation

M. Nakashima, H. Kasugai, A. Deguchi, K. Balakrishnan, M. Iwaya, S. Kamiyama, H. Amano, and I. Akasaki "Simulation and fabrication of nitride-based moth-eye light-emitting diodes", Proc. SPIE 6115, Physics and Simulation of Optoelectronic Devices XIV, 61151Y (28 February 2006); https://doi.org/10.1117/12.661181

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available