Fabrication of large-area two-dimensional photonic crystals using interference lithography and direct writing of defects

Pierre-Yves Baroni; Toralf Scharf; Hans Peter Herzig

doi:10.1117/12.661921

20 April 2006 Fabrication of large-area two-dimensional photonic crystals using interference lithography and direct writing of defects

Pierre-Yves Baroni, Toralf Scharf, Hans Peter Herzig

Author Affiliations +

Proceedings Volume 6182, Photonic Crystal Materials and Devices III (i.e. V); 61821V (2006) https://doi.org/10.1117/12.661921
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

We have developed a process for the direct fabrication of two-dimensional photonic crystals (PC) on large area surfaces that allows creation of defects and defect lines in the PC. The technique is based on lithography and laser beam interference in standard photoresist (PR). In a first step, multiple exposures of interference fringes define a two-dimensional lattice of pillars. Then the light of a Hg lamp is focalized with a microscope to create defect lines using a piezoelectric table. After development, the structures are transferred into silicon layer, deposed onto a glass wafer substrate by plasma etching. The result is a photonic structure of Si pillars where the light is confined in the plane by the PC and out of the plane by wave-guiding.

Citation Download Citation

Pierre-Yves Baroni, Toralf Scharf, and Hans Peter Herzig "Fabrication of large-area two-dimensional photonic crystals using interference lithography and direct writing of defects", Proc. SPIE 6182, Photonic Crystal Materials and Devices III (i.e. V), 61821V (20 April 2006); https://doi.org/10.1117/12.661921

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available