Management and verification for MEMS fabrication processes

T. Schmidt; D. Ortloff; K. Hahn; A. Wagener; J. Popp; R. Brück

doi:10.1117/12.661919

21 April 2006 Management and verification for MEMS fabrication processes

T. Schmidt, D. Ortloff, K. Hahn, A. Wagener, J. Popp, R. Brück

Proceedings Volume 6186, MEMS, MOEMS, and Micromachining II; 61860S (2006) https://doi.org/10.1117/12.661919
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

In MEMS design many different fabrication techniques and materials are involved and the strong dependency between microstructure and fabrication process leads to application specific fabrication processes. A comprehensive management of process knowledge is required to take into account the various interdependencies and constraints occurring within a MEMS fabrication process. This paper presents an environment for the management of process knowledge and provides support for the design and verification of application specific fabrication processes.

Citation Download Citation

T. Schmidt, D. Ortloff, K. Hahn, A. Wagener, J. Popp, and R. Brück "Management and verification for MEMS fabrication processes", Proc. SPIE 6186, MEMS, MOEMS, and Micromachining II, 61860S (21 April 2006); https://doi.org/10.1117/12.661919

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