An optical differential probe for measurement of MEMS topography

Z. Li; K. Herrmann; F. Pohlenz

doi:10.1117/12.662985

27 April 2006 An optical differential probe for measurement of MEMS topography

Z. Li, K. Herrmann, F. Pohlenz

Proceedings Volume 6188, Optical Micro- and Nanometrology in Microsystems Technology; 61880D (2006) https://doi.org/10.1117/12.662985
Event: SPIE Photonics Europe, 2006, Strasbourg, France

Abstract

Topography measurements of MEMS devices are one of the helpful approaches for MEMS devices' quality control, performance evaluation, design optimization, etc. In order to fulfill the requirement to determine the surface topography of a MEMS actuator, especially those of comb-drive types, in which the surface under test is in general discontinuous, a novel principle of an optical differential probe is proposed, in which a common-path laser interferometer and a confocal position sensor are integrated. Details of design and development of the novel differential probe are discussed, including the influence of the geometrical dimensions of the microstructure under test onto the measurement results, basic criteria for the design of the afocal subsystem and edge determination with confocal microscopy. Experimental results verify that the proposed novel approach is applicable.

Citation Download Citation

Z. Li, K. Herrmann, and F. Pohlenz "An optical differential probe for measurement of MEMS topography", Proc. SPIE 6188, Optical Micro- and Nanometrology in Microsystems Technology, 61880D (27 April 2006); https://doi.org/10.1117/12.662985

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