Application of miniature interferometers in nanomeasuring and positioning technology

Jinping Chen; Tong Guo; Xing Fu; Xiaotang Hu

doi:10.1117/12.717309

6 November 2006 Application of miniature interferometers in nanomeasuring and positioning technology

Jinping Chen, Tong Guo, Xing Fu, Xiaotang Hu

Proceedings Volume 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence; 63574A (2006) https://doi.org/10.1117/12.717309
Event: Sixth International Symposium on Instrumentation and Control Technology, 2006, Beijing, China

Abstract

In this article, a work on applying miniature interferometers in nano measuring and positioning system will be introduced. Several types of miniature interferometers, including corner-cube-retroreflector ones, plane-mirror-retroreflector ones and their derivations, will be described. Based on the single-beam plane-mirror interferometers, the triaxial metric system of a Nano Positioning and Measuring Machine (NPMM) is set up. In a working space of 25 mm x 25 mm x 5 mm, the system obeys the "Abbe Principle" to the maximum, having a resolution of 0.1 nm and an uncertainty of measurement of 5 nm - 10 nm.

Citation Download Citation

Jinping Chen, Tong Guo, Xing Fu, and Xiaotang Hu "Application of miniature interferometers in nanomeasuring and positioning technology", Proc. SPIE 6357, Sixth International Symposium on Instrumentation and Control Technology: Signal Analysis, Measurement Theory, Photo-Electronic Technology, and Artificial Intelligence, 63574A (6 November 2006); https://doi.org/10.1117/12.717309

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