A multimode thermo-optic beam steering switch

Jonathan Rogers; Changbao Ma; Makarand Paranjape; Edward Van Keuren

doi:10.1117/12.686226

13 October 2006 A multimode thermo-optic beam steering switch

Jonathan Rogers, Changbao Ma, Makarand Paranjape, Edward Van Keuren

Proceedings Volume 6368, Optoelectronic Devices: Physics, Fabrication, and Application III; 636815 (2006) https://doi.org/10.1117/12.686226
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

Thermooptic switches are viable options for rapidly and reliably switching and routing optical signals in planar lightwave circuits. We present modeling and fabrication of a thermooptic switch made of the polymer SU-8, an epoxy resin commonly used as a MEMS structural material. SU-8 is a good candidate material for use in planar waveguides due to its high refractive index, good transmission properties in the visible and infrared, and excellent thermal and mechanical stability. Furthermore, it has great advantages in fabrication since it is used as a negative photoresist, and so can be patterned directly using photolithography. Light is guided by a refractive index gradient generated by embedded MEMS microheaters, which activate the thermal nonlinearity of the polymer. The thermooptic change in refractive index imparts an inhomogeneous phase shift to the beam in the waveguide, which guides the input into one of two or more outputs. The switch design and operation parameters have been optimized using simulations of the thermal profile using finite element modeling and of the optical propagation using the beam propagation method.

Citation Download Citation

Jonathan Rogers, Changbao Ma, Makarand Paranjape, and Edward Van Keuren "A multimode thermo-optic beam steering switch", Proc. SPIE 6368, Optoelectronic Devices: Physics, Fabrication, and Application III, 636815 (13 October 2006); https://doi.org/10.1117/12.686226

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