Simultaneous measurement of nanometric longitudinal displacement and micrometric lateral displacement by using one line CCD camera

Masaaki Adachi; Yasuto Nishide

doi:10.1117/12.686633

19 October 2006 Simultaneous measurement of nanometric longitudinal displacement and micrometric lateral displacement by using one line CCD camera

Masaaki Adachi, Yasuto Nishide

Author Affiliations +

Proceedings Volume 6374, Optomechatronic Actuators, Manipulation, and Systems Control; 637408 (2006) https://doi.org/10.1117/12.686633
Event: Optics East 2006, 2006, Boston, Massachusetts, United States

Abstract

This paper proposes a simultaneous measurement technique of 2 displacement components by using a laser beam and one high-speed line CCD camera. The laser beam is divided to two beams. One beam is refl ected by a corner refl ector attached on an object and the refl ected beam is superimposed with the other beam. The superimposed beam is expanded by a microscope objective lens and then passed through both a wedge-shape birefringent plate and a polarizer making a fringe pattern. This pattern has a light intensity distribution like a sinusoidal shape whose envelope curve has one peak. The pattern is captured by the line CCD camera and is used to extract nanometric longitudinal displacement and micrometric lateral displacement measurement.

Citation Download Citation

Masaaki Adachi and Yasuto Nishide "Simultaneous measurement of nanometric longitudinal displacement and micrometric lateral displacement by using one line CCD camera", Proc. SPIE 6374, Optomechatronic Actuators, Manipulation, and Systems Control, 637408 (19 October 2006); https://doi.org/10.1117/12.686633

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