Guided-mode resonance device constructed with membrane structure: theoretical analysis and experimental demonstration

Jenq-Yang Chang; Mount-Learn Wu; Che-Lung Hsu; Yun-Chih Lee; Ya-Lun Tsai; Hsiao-Chin Lan; Yung-Chih Liu; Zong-Ru Tu

doi:10.1117/12.700103

9 February 2007 Guided-mode resonance device constructed with membrane structure: theoretical analysis and experimental demonstration

Jenq-Yang Chang, Mount-Learn Wu, Che-Lung Hsu, Yun-Chih Lee, Ya-Lun Tsai, Hsiao-Chin Lan, Yung-Chih Liu, Zong-Ru Tu

Author Affiliations +

Proceedings Volume 6477, Silicon Photonics II; 64770K (2007) https://doi.org/10.1117/12.700103
Event: Integrated Optoelectronic Devices 2007, 2007, San Jose, California, United States

Abstract

In this paper, the guide-mode resonance (GMR) devices based on a suspended membrane structure is designed and experimentally demonstrated. The presented membrane structure possesses a simple structure for resonance excitation and is capable of improving the spectral response. The results of resonance excitation, improving the sideband and low oscillatory spectrum are presented. Due to the utilization of silicon-based materials, the proposed filter is also potential candidates to be integrated with other optoelectronic devices for further applications.

Citation Download Citation

Jenq-Yang Chang, Mount-Learn Wu, Che-Lung Hsu, Yun-Chih Lee, Ya-Lun Tsai, Hsiao-Chin Lan, Yung-Chih Liu, and Zong-Ru Tu "Guided-mode resonance device constructed with membrane structure: theoretical analysis and experimental demonstration", Proc. SPIE 6477, Silicon Photonics II, 64770K (9 February 2007); https://doi.org/10.1117/12.700103

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