This presentation demonstrates the fabrication of bio-inspired electric cilia structures using
bottom-up hetero-nanowires and ionic electro active polymer on flexible polyimide substrates. In
order to obtain sensing function of fluid velocity in meso-scale vessels and minimally disturb original
flow condition, parallel arrays of "electronic cilium" with the size of few micrometers in length and
few hundreds nanometers in diameter are vertically fabricated on a thin flexible film. For active layers,
ionic electro active polymer has been applied on hetero-structured nanowires, which provide low
Young's modulus and sensitive to bending moment by lateral force in fluid. This research works
include the characterization of electro active polymer fabrication processes on nanowires and their
mechanical properties by atomic force microscopy and electrochemical analysis tools. In addition, a
three-dimensional microfluidic channel fabrication method using micro-stereo-lithography (MSL) is
introduced in this presentation, which is an efficient method to simulate fluid conditions in blood vessels.
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