Interferometric testing of aspheric components for EUV reduced camera

Egor Gavrilov; Vladimir Kirillovsky; Peter Orlov; Nikolay Voznesensky; Alexander Zhevlakov

doi:10.1117/12.740592

12 April 2007 Interferometric testing of aspheric components for EUV reduced camera

Egor Gavrilov, Vladimir Kirillovsky, Peter Orlov, Nikolay Voznesensky, Alexander Zhevlakov

Proceedings Volume 6611, Laser Optics 2006: High-Power Gas Lasers; 66110D (2007) https://doi.org/10.1117/12.740592
Event: Laser Optics 2006, 2006, St. Petersburg, Russian Federation

Abstract

Advanced techniques and scheme for testing mirror shape with an accuracy of 0.001&lgr; RMS in visible light by using the point diffraction interferometer and computer processing of interferogramms are presented. The shape of aspheric EUV mirror with 300 mm diameter is characterized.

Citation Download Citation

Egor Gavrilov, Vladimir Kirillovsky, Peter Orlov, Nikolay Voznesensky, and Alexander Zhevlakov "Interferometric testing of aspheric components for EUV reduced camera", Proc. SPIE 6611, Laser Optics 2006: High-Power Gas Lasers, 66110D (12 April 2007); https://doi.org/10.1117/12.740592

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