Optical correlation measurement of surface roughness

Oleg V. Angelsky; Alexander P. Maksimyak; Peter P. Maksimyak

doi:10.1117/12.725978

18 June 2007 Optical correlation measurement of surface roughness

Oleg V. Angelsky, Alexander P. Maksimyak, Peter P. Maksimyak

Proceedings Volume 6616, Optical Measurement Systems for Industrial Inspection V; 66162G (2007) https://doi.org/10.1117/12.725978
Event: Optical Metrology, 2007, Munich, Germany

Abstract

The feasibilities for optical correlation diagnostics of a rough surface with large surface inhjmogeneities by determining the transformations of the longitudinal coherence function of the field scattered by such surface are substantiated and implemented.

Citation Download Citation

Oleg V. Angelsky, Alexander P. Maksimyak, and Peter P. Maksimyak "Optical correlation measurement of surface roughness", Proc. SPIE 6616, Optical Measurement Systems for Industrial Inspection V, 66162G (18 June 2007); https://doi.org/10.1117/12.725978

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