Metrology for templates of UV nano imprint lithography

Kouji Yoshida; Kouichirou Kojima; Makoto Abe; Shiho Sasaki; Masaaki Kurihara; Hiroshi Mohri; Naoya Hayashi

doi:10.1117/12.746802

30 October 2007 Metrology for templates of UV nano imprint lithography

Kouji Yoshida, Kouichirou Kojima, Makoto Abe, Shiho Sasaki, Masaaki Kurihara, Hiroshi Mohri, Naoya Hayashi

Proceedings Volume 6730, Photomask Technology 2007; 67305O (2007) https://doi.org/10.1117/12.746802
Event: SPIE Photomask Technology, 2007, Monterey, California, United States

Abstract

Templates for UV-Nano-imprint lithography (NIL) have developed aggressively. Feature sizes of the templates have come to less than 30 nm. Therefore metrology is also one of challenging items to fabricate templates for UV-NIL. However, there are many issues in metrology for the templates, for instance, necessity of the further resolution for measurement tools, charging issues without conductive layers for a SEM. In this paper, we will focus on metrology of the templates for UV-NIL. And also some measurement techniques are described about detail results using scanning probe microscope, CD-SEM, scattermetry and so on.

Citation Download Citation

Kouji Yoshida, Kouichirou Kojima, Makoto Abe, Shiho Sasaki, Masaaki Kurihara, Hiroshi Mohri, and Naoya Hayashi "Metrology for templates of UV nano imprint lithography", Proc. SPIE 6730, Photomask Technology 2007, 67305O (30 October 2007); https://doi.org/10.1117/12.746802

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available