Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

H. Huang; S. Liu; J. M. Dell; L. Faraone

doi:10.1117/12.758816

9 January 2008 Mechanical characteristics of filter structures for MEMS adaptive infrared detectors

H. Huang, S. Liu, J. M. Dell, L. Faraone

Proceedings Volume 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV; 68000R (2008) https://doi.org/10.1117/12.758816
Event: SPIE Microelectronics, MEMS, and Nanotechnology, 2007, Canberra, ACT, Australia

Abstract

This paper reports the mechanical design and optimization of tunable Fabry-Perot (FP) filter structures for the development of MEMS adaptive infrared detectors using finite element modeling and experimental investigations. The results indicate that the mechanical characteristics of the FP filters are significantly influenced by the structural designs, which eventually affect the filter performance and device integrity.

Citation Download Citation

H. Huang, S. Liu, J. M. Dell, and L. Faraone "Mechanical characteristics of filter structures for MEMS adaptive infrared detectors", Proc. SPIE 6800, Device and Process Technologies for Microelectronics, MEMS, Photonics, and Nanotechnology IV, 68000R (9 January 2008); https://doi.org/10.1117/12.758816

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