Multiple phase-shifting white-light interferometry for quantitative detection

Tomotake Terasawa; Atsushi Wada; Yukihiro Ishii

doi:10.1117/12.768580

24 January 2008 Multiple phase-shifting white-light interferometry for quantitative detection

Tomotake Terasawa, Atsushi Wada, Yukihiro Ishii

Proceedings Volume 6829, Advanced Materials and Devices for Sensing and Imaging III; 682928 (2008) https://doi.org/10.1117/12.768580
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

The conventional phase-shifting interferometry (PSI) algorithm used in white-light phase-shifting interferometry (WLPSI) is not effective for the steep envelope change in the interferogram. We have developed a new 7-step algorithm that is insensitive to the steep contrast change in the envelope of interferogram. Seven-step algorithm includes the envelope change in the interferogram is approximated to be a parabolic function. The detection accuracy of the contrast peak and the accuracy in phase-extraction routine of a 7-step algorithm have been compared with those of a 5-step algorithm.

Citation Download Citation

Tomotake Terasawa, Atsushi Wada, and Yukihiro Ishii "Multiple phase-shifting white-light interferometry for quantitative detection", Proc. SPIE 6829, Advanced Materials and Devices for Sensing and Imaging III, 682928 (24 January 2008); https://doi.org/10.1117/12.768580

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