An optical method of online measurement for the thickness of thin films

Min Song; Yaru Zheng; Yongjun Lu; Yanling Qu

doi:10.1117/12.756978

28 November 2007 An optical method of online measurement for the thickness of thin films

Min Song, Yaru Zheng, Yongjun Lu, Yanling Qu

Proceedings Volume 6834, Optical Design and Testing III; 683433 (2007) https://doi.org/10.1117/12.756978
Event: Photonics Asia 2007, 2007, Beijing, China

Abstract

This paper introduced an optical method for measuring the thickness of solid thin films. This method is of high measuring speed, noncontact and online work. An experimental system has been constructed for on-line measurement of the thickness of thin film. The experimental results show that the measuring error is lower than 10% in the range of 10~100μm , which fit the production need.

Citation Download Citation

Min Song, Yaru Zheng, Yongjun Lu, and Yanling Qu "An optical method of online measurement for the thickness of thin films", Proc. SPIE 6834, Optical Design and Testing III, 683433 (28 November 2007); https://doi.org/10.1117/12.756978

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