Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks

Jee Soo Chang; Myung-Ki Kim; Yong-Hee Lee; Jung H. Shin; Gun Yong Sung

doi:10.1117/12.764327

12 February 2008 Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks

Jee Soo Chang, Myung-Ki Kim, Yong-Hee Lee, Jung H. Shin, Gun Yong Sung

Proceedings Volume 6897, Optoelectronic Integrated Circuits X; 68970O (2008) https://doi.org/10.1117/12.764327
Event: Integrated Optoelectronic Devices 2008, 2008, San Jose, California, United States

Abstract

Micro-disk resonators were fabricated using Er doped silicon-rich silicon nitride (SRSN:Er). SRSN:Er thin films are fully CMOS-compatible and show efficient Er3+ luminescence pumped off-resonantly via Si nanoclusters. The high refractive index of SRSN (>2.0 at 1.5 μm) allows freedom in designing compact micro-disk resonators. Micro-disks with two different contents of Er (0.2 at.%, 0.02 at.%) with a diameter of 25 μm were fabricated, and characterized using evanescent coupling using tapered fibers. Whispering gallery modes with Q-factors in excess of 13000 were obtained, and FDTD calculations indicate that much higher values should be possible. Finally, we demonstrate excitation of fundamental whispering gallery mode via off-resonant, top-pumping of the SRSN microdisk.

Citation Download Citation

Jee Soo Chang, Myung-Ki Kim, Yong-Hee Lee, Jung H. Shin, and Gun Yong Sung "Fabrication and characterization of Er doped silicon-rich silicon nitride(SRSN) micro-disks", Proc. SPIE 6897, Optoelectronic Integrated Circuits X, 68970O (12 February 2008); https://doi.org/10.1117/12.764327

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