High density Si nanodots: fabrication and properties

J. Xu; J. Zhou; X. Li; Z. Cen; D. Chen; W. Li; L. Xu; Z. Ma; K. Chen

doi:10.1117/12.792268

11 March 2008 High density Si nanodots: fabrication and properties

J. Xu, J. Zhou, X. Li, Z. Cen, D. Chen, W. Li, L. Xu, Z. Ma, K. Chen

Proceedings Volume 6984, Sixth International Conference on Thin Film Physics and Applications; 69840E (2008) https://doi.org/10.1117/12.792268
Event: Sixth International Conference on Thin Film Physics and Applications, 2007, Shanghai, China

Abstract

We propose an approach to achieve single layer of Si nanodots arrays on insulating layer by using KrF pulsed excimer laser irradiation on ultra-thin hydrogenated amorphous silicon films followed by thermal annealing. Under the suitable fabrication conditions, the area density of formed Si nanostructures can be higher than 10¹¹cm^-2 as revealed by AFM images. The size of formed Si nanodots is 3-4 nm for sample with initial a-Si:H film thickness of 4 nm. Room temperature visible light emission can be observed from laser irradiated a-Si:H film after thermal annealing. The results on electron field emission properties were also presented in this paper.

Citation Download Citation

J. Xu, J. Zhou, X. Li, Z. Cen, D. Chen, W. Li, L. Xu, Z. Ma, and K. Chen "High density Si nanodots: fabrication and properties", Proc. SPIE 6984, Sixth International Conference on Thin Film Physics and Applications, 69840E (11 March 2008); https://doi.org/10.1117/12.792268

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available