Micro-ring resonators fabricated by focused-ion-beam on SOI

Jie Tian; Min Qiu

doi:10.1117/12.803132

11 November 2008 Micro-ring resonators fabricated by focused-ion-beam on SOI

Jie Tian, Min Qiu

Proceedings Volume 7136, Optical Transmission, Switching, and Subsystems VI; 71362G (2008) https://doi.org/10.1117/12.803132
Event: Asia-Pacific Optical Communications, 2008, Hangzhou, China

Abstract

We present the fabrication of high Q factor micro-ring resonators on SOI substrate by directly focused-ion-beam (FIB) milling. Micro-ring resonators with diameters of 10 μm and 80 μm are fabricated and their corresponding intrinsic Q factors are 4,000 and 130,000, respectively.

Citation Download Citation

Jie Tian and Min Qiu "Micro-ring resonators fabricated by focused-ion-beam on SOI", Proc. SPIE 7136, Optical Transmission, Switching, and Subsystems VI, 71362G (11 November 2008); https://doi.org/10.1117/12.803132

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available